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Atomic Layer Deposition Processes for emerging materials

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Author: Blanquet, E.

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405144555

FWCI:

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