A 62 Hz high-Q 4-spiral mechanical resonator fabricated of a silicon wafer
Year: 2024
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/5.0224255
Authors: Y. Yu. Klochkov, V. P. Mitrofanov
Institution: Lomonosov Moscow State University
Language: English
Subfield: Astronomy and Astrophysics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405190607