Work

Accuracy improvement of focusing and leveling sensors based on pupil phase modulation

Year: 2024

Type: article

Source: Applied Optics

DOI: 10.1364/ao.545573

Authors: Ke Lan, Xiao Liu, Tingyuan Jia, Liandong Pan, Jianrui Cheng, Yunfeng Li, Xiangzhao Wang, Cailian Chen

Institutions: Shanghai Micro Electronics Equipment (China), Zhejiang University

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G1705705081, G4410675469, G5417780894, G5605764086, G5935165963

OpenAlex ID: W4405226097

FWCI:

Cites: 21

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Related to: 10