LiTaO 3 ‐ on‐YAG surface acoustic wave resonator with low TCF and spurious modes mitigation
Year: 2024
Type: article
Abstract: Surface acoustic wave (SAW) resonators employing LiTaO 3 piezoelectric platelet on yttrium aluminium garnet (YAG) substrate are designed with a low temperature coefficient of frequency (TCF) and spurious modes suppression. Transverse modes in the structure are suppressed through the transducer topology, while the higher‐order plate‐guided modes are inherently suppressed by the YAG‐based device platform. Fabricated 1.7 GHz SAW resonator demonstrates significant suppression of the higher order spurious modes as compared to their counterpart on Si (100) base while retaining very low TCF and Q factor of about 2700. The maximum resonance‐to‐antiresonance (R‐aR) bandwidth is estimated to be 4.8%. YAG‐based SAW platform is an alternative to the classical Si‐based SAW platform in radio frequency filters in the lower GHz range, offering high performance and simplifying the stack topology by eliminating the need for additional charge trapping layers. Preliminary estimations show that YAG being commercially viable in photonics is scalable to 4″–6″ low‐cost wafers, required in the RF SAW industry.
Source: Electronics Letters
DOI: 10.1049/ell2.70105
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,540
OpenAlex ID: W4405231331