Work

Fast lithographic source optimization adopting RMSProp with iterative shrinkage-thresholding algorithm compressive sensing for high fidelity patterning

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3052755

Authors: Zhen Li, Yang he, Miao Yuan, Zhaoxuan Li, Yuqing Chen, Yanqiu Li

Institution: Beijing Institute of Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235272

FWCI: 0.779

Cites: 16

Cited by: 1

Related to: 10