Work

Allocation method of micromirror array for deep ultraviolet illumination system

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3052954

Authors: Yuqing Chen, Yanbei Nan, Tong Li, Zhenkun Zhang, Yanqiu Li

Institution: Beijing Institute of Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235373

FWCI:

Cites: 8

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Related to: 10