SONR-based gauge down sampling for OPC modeling
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3054862
Authors: Haibin Yu, Biqiu Liu, Shirui Yu, Jishuo Yang, Xinyi Hu
Institutions: Shanghai Huali Microelectronics (China), Siemens (China)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405235474