Work

Influence of sidewall affinity on the directed self-assembly for contact hole multiplication

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3055257

Authors: Jiacheng Luo, Zhiyong Wu, Zili Li, Yan Zhang, Shengxiang Ji, Shisheng Xiong

Institutions: Fudan University, Shanghai Zhangjiang Laboratory, Zhangjiang Laboratory, Changchun Institute of Applied Chemistry

Language: English

Topic: Block Copolymer Self-Assembly

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235512

FWCI:

Cites: 8

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Related to: 10