Work

Evaluation of hotspots EPE propagation through step-by-step SEM contour analysis

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3052998

Authors: Kan Zhou, Wenzhan Zhou, Yuanyuan Meng, Xiaohang Su, Libo Wang, xiaoci Li, Zhengfang Liu, Chunshan Du, Huaiyang Dou

Institutions: Shanghai Huali Microelectronics (China), Siemens (China)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235542

FWCI: 0.721

Cites: 9

Cited by: 1

Related to: 10