Integrated circuit defect classification based on multi-layer attention mechanisms
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3053071
Authors: Botong Zhao, Yue Lu, Kan Zhou, Wenzhan Zhou
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405235569