Work

Silicon process characterization based on massive SEM contour extraction and hotspot pattern decomposition

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3052985

Authors: Kan Zhou, Wenzhan Zhou, Yuanyuan Meng, xintong Zhao, Liang Xu, Yingzhou Zheng, Wenzhuang Liu, Bo Shen, Xiaohui Zhuang

Institution: Shanghai Huali Microelectronics (China)

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235599

FWCI:

Cites: 10

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Related to: 10