Work

Frequency-domain modeling-free learning control for wafer stages with transient improvement by adaption

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3053096

Authors: Pengyu Sun, Fazhi Song, Yang Liu, Jiubin Tan

Institution: Harbin Institute of Technology

Language: English

Topic: Iterative Learning Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405235806

FWCI:

Cites: 14

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Related to: 10