Advancing semiconductor defect detection with integrated deep learning and color scale preprocessing
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3052800
Authors: Zheng Lan, Wei Zhao, Xiupeng Shi
Institution: Shanghai University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405236010