Work

GAOPC improves OPC parameter search efficiency and convergence speed

Year: 2024

Type: conference-paper

Source: International Workshop on Advanced Patterning Solutions (IWAPS)

DOI: 10.1117/12.3052233

Authors: Xing-yu Zhou, Yingchen Wu, Ming-ying Fan, Guan-yong Yan, Boer Zhu, Jacky Cheng

Language: English

Topic: Metaheuristic Optimization Algorithms Research

Subfield: Artificial Intelligence

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405237774

FWCI:

Cites: 2

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Related to: 10