Deep level transient spectroscopy: Tracing interface and bulk trap‐induced degradation in AlGaN/GaN‐heterostructure based devices
Year: 2024
Type: article
Abstract: The exceptional physical properties of gallium nitride (GaN) position GaN‐based power devices as leading candidates for next‐generation high‐efficiency smart power conversion systems. However, GaN's multi‐component nature results in a high density of epitaxial defects, whereas the introduction of dielectric layers further contributes to severe interface states and dielectric traps. These factors collectively impair reliability, manifesting as threshold voltage instability and current collapse, which pose significant barriers to the advancement of GaN‐based electronics. Establishing the intrinsic relationship between device reliability and defects is crucial for understanding and addressing reliability degradation issue. Deep level transient spectroscopy (DLTS) offers valuable insights by revealing defect‐induced changes in electrical parameters during the capture and emission processes under varying biases, thereby elucidating the influence of defects from GaN buffer layers, AlGaN barriers, dielectric layer, and even at dielectric/(Al)GaN interfaces. This research aims to provide a foundational understanding of reliability degradation whereas further enabling enhancements in device performance from the perspectives of epitaxial growth and process preparation, ultimately striving to improve the reliability of GaN‐based devices and unlock their full potential for practical applications.
DOI: 10.1002/ifm2.27
Authors: Kexin Deng, Sen Huang, Xinhua Wang, Yixu Yao, Yang Yang, Li Yu, Yaoyao Pei, Jiayi An, Qimeng Jiang, Xinyu Liu, Song Yang, Kevin J. Chen
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: diamond
Funders: National Natural Science Foundation of China, Chinese Academy of Sciences, Youth Innovation Promotion Association of the Chinese Academy of Sciences, Hong Kong University of Science and Technology, Beijing Municipal Science and Technology Commission, Institute of Microelectronics of the Chinese Academy of Sciences, National Key Research and Development Program of China, Youth Innovation Promotion Association
OpenAlex ID: W4405265283
