Work

Silicon and cellulose: influence of the substrate on the growth of ALD Al2O3

Year: 2024

Type: conference-paper

Source: HAL (Le Centre pour la Communication Scientifique Directe)

Authors: Patureau, Hugo, Encinas, Thierry, Crisci, Alexandre, Mercier, Frédéric, Gicquel, Erwan, Mantoux, Arnaud, Blanquet, E.

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405299434

FWCI:

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