Work

Structural and piezoelectric properties of chemical vapor deposited AlN films on metallic substrates：DOE approach

Year: 2019

Type: conference-paper

Source: HAL

Authors: Su, Juan, Pons, Michel, Mercier, Frédéric, Chen, Danying, Boichot, Raphaël

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405299505

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