Work

Cyclone-type vaporizer for mass delivery of atomic layer deposition precursors: Simulation and experimental studies

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004013

Authors: Seung-Ho Seo, Donggeon Shin, Cha-Hee Kim, Keun-Tae Jeong, Yeongjong Lee, Daehyun Kim, Hyun Koock Shin, Won-Jun Lee

Institution: Sejong University

Language: English

Topic: Cyclone Separators and Fluid Dynamics

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Korea Basic Science Institute, Korea Evaluation Institute of Industrial Technology

Awards: G5245048972, G649665237

OpenAlex ID: W4405313549

FWCI:

Cites: 15

Cited by:

Related to: 10