Work

Research on nanoscale grid pitch characterization method based on metrological atomic force microscopy

Year: 2024

Type: conference-paper

Source: International Conference on Optoelectronic Science and Materials (ICOSM)

DOI: 10.1117/12.3054245

Authors: Chong Yue, Yueqing Ding, Zhen Wu, Lei Tao, Yingqian Ni, Kun Jiang

Institution: Chongqing Metrology Quality Inspection and Research Institute

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405328283

FWCI:

Cites: 10

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Related to: 10