Nonvolatile silicon photonics based on monolithic back-end-of-line integration phase-change-materials platform for optical neural networks
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3045725
Institutions: Zhejiang University, Institute of Microelectronics
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405352198