E-beam lithography fabricated optical 90-degree hybrid on InP platform
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3046432
Authors: Mingming Pan, Bing Wang
Institution: Sun Yat-sen University
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405359113