High-speed and large range measurement technology of microstructure surface morphology based on laser scanning lateral differential confocal
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3048143
Authors: Wang Zhenru, Yu Sen, Qiu Lirong
Institution: Beijing Institute of Technology
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405359232