Work

Broadband, high-reflectivity, and low-stress optical thin film with a composite of metallic film and DBR for MEMS FSM

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3048075

Authors: Biqing Zhou, Biyun Ling, Yaming Wu

Institutions: Shanghai Institute of Microsystem and Information Technology, University of Chinese Academy of Sciences

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405359561

FWCI: 2.927

Cites: 12

Cited by: 1

Related to: 10