Work

Anti-vibration surface reconstruction method for on-machine coherence scanning interferometric measurement

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3045888

Authors: Jiayu Liu, Sotero Ordones, Rongxian Wen, Mingjun Ren, Limin Zhu, Rong Su

Institutions: Shanghai Jiao Tong University, Shanghai Institute of Optics and Fine Mechanics

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405359768

FWCI:

Cites: 14

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Related to: 10