Wafer-Scale Fabrication Technologies for Integrated Superconducting Quantum Circuits
Year: 2024
Type: article
Authors: L. Kaczmarek, M. Schmelz, K. Peiselt, A. Sultanov, E. Mutsenik, G. Oelsner, R. Stolz
Institution: Leibniz Institute of Photonic Technology
Language: English
Subfield: Artificial Intelligence
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405360919
