Work

Experimental Study of Force Induced by Probe Length Influence on Electrical Contact Resistance of Pillar Bump-Flat Vertical Probe Interaction during Wafer Electrical Test

Year: 2024

Type: conference-paper

DOI: 10.1109/dttis62212.2024.10780125

Authors: Cedric Hermet, Luc Favre, Stéphanie Escoubas, Salvatore De Siena, Robert Diperi

Institutions: Centre National de la Recherche Scientifique, Aix-Marseille Université, Institut des Matériaux, de Microélectronique et des Nanosciences de Provence, STMicroelectronics (France)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: STMicroelectronics

OpenAlex ID: W4405361670

FWCI: 0.779

Cites: 8

Cited by: 1

Related to: 10