Work

Mid-infrared electro-optic modulation by phase-change materials driven by transparent MEMS microheaters

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3046363

Authors: Xin Hu, Dongyu Zhang, Yin Xu, Lusheng Xiao, Mi Yan

Institutions: Soochow University, Zhejiang University, Semiconductor Manufacturing International (China)

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405362147

FWCI:

Cites: 16

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Related to: 10