Performance variation with pristine and doped high‐k materials via atomic layer deposition
Year: 2024
Type: article
DOI: 10.1111/ijac.15001
Authors: Eun Su Jung, JinUk Yoo, Tae Min Choi, Hwa Rim Lee, Chae Yeon Lee, Dong Hyun Kim, Sung Gyu Pyo
Institution: Chung-Ang University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405382941