Atomic Layer Deposition for Complex-Shape and Temperature Sensitive Objects: Towards New Functions and Products
Year: 2021
Type: conference-paper
Source: HAL
Author: Mercier, Frédéric
Institution: Science et Ingénierie des Matériaux et Procédés
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4405418304