Work

Stress control of AlN-based multilayer coatings with amorphous intermediate layers

Year: 2022

Type: conference-paper

Source: HAL

Authors: Tabouret, Vincent, Reboud, Roman, Crisci, Alexandre, Mercier, Frédéric

Institution: Science et Ingénierie des Matériaux et Procédés

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405418318

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Related to: 10