Work

Design of Partially High-Temperature Superconducting Planar Motor for Semiconductor Optical Lithography

Year: 2024

Type: conference-paper

DOI: 10.1109/isesc63657.2024.10785339

Authors: Koichi Matsuda, Xueying Ma

Institution: Hunan University

Language: English

Topic: Superconducting Materials and Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405491222

FWCI: 0.954

Cites: 13

Cited by: 1

Related to: 10