Year: 2024
Type: conference-paper
Abstract: Traditional Quartz Crystal Microbalance (QCM) sensors used for biological detection are limited in mass sensitivity due to their large thickness. This study presents a biosensor utilizing a Shear Horizontal Acoustic Plate Mode (SHAPM) resonator constructed from a suspended Y+36° cut LiNbO3(LNO) plate. LNO is chosen over quartz or AlN for its higher permittivity, which reduces capacitive coupling when in contact with water. Finite Element Method (FEM) simulations reveal that mass sensitivity (Sm) increases with decreasing LNO plate thickness, yet structural integrity limits the minimum thickness to 2 μm, resulting in Sm= 70 Hz•cm2/ng. The device is integrated into a microfluidic system and a printed circuit board for real-time detection. The sensor exhibits a limit of detection (LOD) of 15 ng/cm2for non-specific binding of Bovine Serum Albumin (BSA). This is comparable to that of previously reported Love wave devices.
Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information, Centre National de la Recherche Scientifique, Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, Université Bourgogne Franche-Comté
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4405517496