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A Ku-Band 2nd Order Mode FBAR Based on Bilayer Polarity-Inverted Single Crystal AlN Films

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793659

Authors: Jinghong Lu, Chongyang Huo, Jiaqi Fu, Ruidong Qin, Zhiqiang Mu, Wenjie Yu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Shanghai Technology Innovation Project

OpenAlex ID: W4405517618

FWCI: 6.689

Cites: 18

Cited by: 7

Related to: 10