Pure Premium Quartz (PPQ) Synthesis for SAW Resonators Beyond the State of the Art
Year: 2024
Type: conference-paper
Authors: Delphine Pichhedda, Hugues Cabane, Thomas Contiero, Christope Jaquier, Audrey Burlon, Patricia Jeandel, Sylvain Ballandras, Emilie Courjon, Gabrielle Aspar, Florent Bernard, Saly Ndiaye, Jean-Marc Lesage
Institutions: Soitec (France), Direction Générale de l'Armement
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Arm
OpenAlex ID: W4405517619