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6.5 GHz BAW Resonators and Filters Fabricated on Single Crystal AlN Template

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794068

Authors: Wentong Dou, Xuanqi Huang, Shaojie Zhou, Jiangmei Zhang, Yang Gao, Chao Yuan, Zhiqiang Mu, Wenjie Yu

Institutions: Southwest University of Science and Technology, Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Wuhan University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Shanghai Technology Innovation Project

OpenAlex ID: W4405517632

FWCI: 6.689

Cites: 15

Cited by: 7

Related to: 10