Work

A Study on PVD PZT and Sc 0.2 Al 0.8 N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793916

Authors: David Sze Wai Choong, Daniel Ssu-Han Chen, Mantalena Sarafianou, Duan Jian Goh, Jihang Liu, Srinivas Merugu, Sagnik Ghosh, Prakasha Ramegowda, Qing Xin Zhang, Peter Chang, Joshua En-Yuan Lee, Jason Jia, Alberto Leotti, Luigi Baretta, Domenico Giusti, Alessandro Savoia, Yul Koh

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics, STMicroelectronics (Singapore), STMicroelectronics (Italy), Roma Tre University

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405517637

FWCI: 4.1

Cites: 7

Cited by: 2

Related to: 10