Work

Compensation of Thermal Effects in PZT and Sc0.2Al0.8N PMUTs Through DC Bias Tuning

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794161

Authors: Duan Jian Goh, Jihang Liu, David Sze Wai Choong, Sagnik Ghosh, Daniel Ssu-Han Chen, Ravi Shankar, Carlo Luigi Prelini, Alberto Leotti, Domenico Giusti, Yul Koh

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics, STMicroelectronics (Singapore), STMicroelectronics (Italy)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405517656

FWCI:

Cites: 8

Cited by:

Related to: 10