Work

Thickness-Dependent Switching and Device-to-Device Uniformity Analysis of Al0.7Sc0.3N-Based Ferroelectric Capacitor on 8-inch Si Wafer

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793801

Authors: Subhranu Samanta, Glen Wong, Lee Hock Koon, Minghua Li, Binni Varghese, Huamao Lin, Chen Liu, Yao Zhu

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Science and Engineering Research Council

OpenAlex ID: W4405517697

FWCI:

Cites: 9

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Related to: 10