Work

Enhanced Coupling Coefficient of Surface Acoustic Wave on AlN Film/High-Velocity Substrates with Periodic Trough Structure

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793531

Authors: Huiling Liu, Qiaozhen Zhang, Hao Sun, Xiuli Gao, Nan Wang, Yuandong Gu

Institutions: Shanghai University, Shanghai Normal University, Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405517753

FWCI:

Cites: 11

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Related to: 10