Work

Clamping Effect of Dielectric and Ferroelectric Properties in ScAlN

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793920

Authors: Chen Liu, Ying Zhang, You Qian, Xinghua Wang, Li Chen, Qingxin Zhang, Yao Zhu

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Science and Engineering Research Council

OpenAlex ID: W4405517774

FWCI:

Cites: 12

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Related to: 10