Work

Characterization of AlN and AlScN thin films CPW Transmission on High-Resistive Substrates

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793661

Authors: Kang Du, Fengyu Liu, Xuankai Xu, Tao Wu

Institution: ShanghaiTech University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Shanghai, Research and Development

OpenAlex ID: W4405521422

FWCI:

Cites: 10

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Related to: 10