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The Suppression of Transverse Modes in POI SAW Resonators with Selective Thinning of Silicon Substrate

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794132

Authors: Menghui Li, Mengke Qi, Yuanhang Chen, Yimin Cheng, Liang Cao, Xiaojing Mu

Institution: Chongqing University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Science Fund for Distinguished Young Scholars of Chongqing

OpenAlex ID: W4405521645

FWCI:

Cites: 15

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Related to: 10