Work

Wafer level Demonstration and Characterization of c-Axis Oriented Sc0.3Al0.7N Bilayer Stacks

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793771

Authors: Huamao Lin, Peng Liu, Daniel Ssu-Han Chen, Binni Varghese, Veronica Wong, Minghua Li, Yan Hong, Yat Fung Tsang, Qing Xin Zhang, Peter Hyun Kee Chang, Naadaa Zakiyyan, Goutham Koppisetti, Amal Das, Dao Hao Sim, Yee Lung Lee, Alberto Leotti, Yao Zhu

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics, STMicroelectronics (Singapore)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Science and Engineering Research Council

OpenAlex ID: W4405521793

FWCI: 1.986

Cites: 5

Cited by: 2

Related to: 10