Work

Technology for Piezoelectric Micromachined Ultrasonic Transducers with Adaptive Channel Geometry and Chip Size

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793711

Authors: Chris Stoeckel, Shubham Mulay, Katja Meinel, Jörn Bankwitz, Jan Seiler, Dirk Ullmann, Danny Reuter

Institutions: Fraunhofer Institute for Electronic Nano Systems, Chemnitz University of Technology

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405521804

FWCI: 2.14

Cites: 7

Cited by: 1

Related to: 10