Work

SAW Resonators Based on High-Crystalline AlScN Film Grown by a Two-Step Method of MOCVD and PVD

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793630

Authors: Kai Yang, Jie Chen, Fuhong Lin, Han Qiu, Jiming Fang, Chengjie Zuo

Institution: University of Science and Technology of China

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

OpenAlex ID: W4405521920

FWCI: 2.867

Cites: 29

Cited by: 3

Related to: 10