Work

In Quest of Temperature-Dependent Ferroelectric Switching in 50 nm Al0.7Sc0.3N Thin Film

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793900

Authors: Subhranu Samanta, Chen Liu, Lee Hock Koon, Minghua Li, Binni Varghese, Huamao Lin, Li Chen, Yao Zhu

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Science and Engineering Research Council

OpenAlex ID: W4405521944

FWCI:

Cites: 11

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Related to: 10