Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators
Year: 2024
Type: conference-paper
Abstract: This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated piezoelectric micro- and nano-electromechanical (M/NEMS) resonators. The proposed approach models the mechanical quality factor (Qm) and its dependency on piezoelectric (Qpiezo) and metal (Qmetal) acoustic losses, as a function of the mode of vibration dispersion characteristics. The model is finally experimentally validated by exploiting the intrinsic on-chip multifrequency manufacturability of interdigitated devices.A broad range of available resonator technologies, frequencies, and piezoelectric materials are investigated for this purpose, including bulk X-cut Lithium Niobate (XLN) leaky surface acoustic wave resonators operating at Ultra High Frequency (UHF), thin film XLN Lamb Wave resonators spanning between Very High Frequency (VHF) and the Kuband, and Aluminum Nitride (AlN) and scandium-doped AlN (ScAlN) cross-sectional lamé mode resonators ranging from the Kuto Kaband (mmWave).
Institution: Northeastern University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4405521989