Work

Low-Vacuum Sensing With Silicon-On-Nothing Resonating Membrane

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10794055

Authors: Daniel Ssu-Han Chen, Jihang Liu, David Sze Wai Choong, Duan Jian Goh, Sagnik Ghosh, Jaibir Sharma, Yul Koh

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405522099

FWCI: 1.612

Cites: 9

Cited by: 2

Related to: 10