Work

Biocompatible Hermetic Encapsulation of PMUTs for Usage in Implantable Medical Devices

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793944

Authors: Esmaeil Afshari, Samer Houri, Rik Verplancke, Veronique Rochus, Maarten Cauwe, Pieter Gijsenbergh, Xavier Rottenberg, Maaike Op de Beeck

Institutions: IMEC, Ghent University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Good health and well-being

Open Access status: closed

OpenAlex ID: W4405522162

FWCI: 0.806

Cites: 11

Cited by: 1

Related to: 10