Work

Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities

Year: 2024

Type: conference-paper

DOI: 10.1109/uffc-js60046.2024.10793542

Authors: Sagnik Ghosh, Prakasha Chigahalli Ramegowda, Duan Jian Goh, Jaibir Sharma, Yul Koh, Joshua Lee

Institutions: Agency for Science, Technology and Research, Institute of Microelectronics

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4405522343

FWCI:

Cites: 14

Cited by:

Related to: 10